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海德創業（北京）生物科技有限公司
海德創業（北京）生物科技有限公司
EMS150T的機殼是整體成型的，結構堅固耐用，配有氣冷的70L/S的渦輪分子泵，自動進氣控制保證了濺射期間Z佳的真空水平，真空腔室直徑為165mm并帶有防爆裝置。EMS150T具有“真空閉鎖"功能，可在設備不工作時維持腔室的真空度，從而保證高真空的性能。
| 儀器尺寸 | 585mm寬*470mm*410mm高（總高650mm） |
| 重量 | 33.4KG |
| 工作腔室 | 150mm（內徑）*127mm（高）硼硅酸鹽玻璃腔室，并帶整體安全防護罩 |
| 觸摸屏用戶界面 | 帶有觸摸按鈕的全圖像界面，包含多達十個鍍膜程序，可提醒何時需要維護 |
| 工作腔室 | 150mm（內徑）*127mm（高）硼硅酸鹽玻璃腔室，并帶整體安全防護罩 |
| 樣品臺 | 轉速為8-20rpm的旋轉臺 |
| 真空系統 | 渦輪子分子泵：帶有內部空氣卻的渦輪分子泵，抽速為70L/s 旋轉機械泵：抽速為50L/m的兩級旋轉機械泵，帶有油污過濾器 |
| 真空測量 | 皮拉尼真空計作為標配 |
| 極限真空度 | 10-5mbar兩級 |
| 電源需求 | 90-250V~50/60Hz 1400VA（ 包括旋轉機械泵電壓240V） |
| 氣體 | 濺射工作氣體氬氣，99.999%（TS和TES版本）；氮氣，放氣破真空氣體（可選） |
| 金屬蒸發和光闌清潔頭 | 用于源自鎢絲籃或舟的金屬熱蒸發。可配備一個標準鉬舟用于清潔SEM或TEM光闌 |
| 碳蒸發 | 穩定的無紋波直流電源控制的脈沖蒸發，確保源自碳棒或碳絲的可重復蒸碳 |
| 電流脈沖 | 1-90安培 |
| 濺射 | 0-150mA。可預設膜厚（需FTM選項）或使用內置定時器 |
| 濺射工作真空范圍 | 5*10-3到5*10-1mbar |
| 濺射靶材和碳耗材供應 | EMS150TS和EMS150TES標配鉻靶，但可選用的其它靶材范圍很寬，包括那些廣泛用于SEM制樣的靶材，如：Au金靶，Au/pd金鈀，Pt鉑靶，和Iridium銥靶。對非SEM應用，可選用的靶材包括：AI鋁，Ta鉭，ITO氧化銦錫，Fe鐵，W鎢，Ti鈦，等等：碳制品包括高純度碳棒和碳絲纖維 |
| 貨號 | 產品名稱 |
| 3390 | EMS150T E Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods （3.05mm Ø x 300mm） and a carbon rod shaper （manual operation） |
| 3380 | EMS150T S - High resolution turbomolecular pumped sputter coater, including a 54mm Ø x 0.3mm chromium target |
| 3400 | EMS150T ES - High-resolution turbomolecular pumped sputter coater, including a 57mm Ø x 0.3mm chromium target and high vacuum carbon rod evaporation coater for 3.05mm Ø carbon rods. |
| 91003 | Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter |
| 貨號 | 產品名稱 |
| 3200 | Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section |
| 3210 | Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly. |
| 3230 | Carbon rod evaporation head insert （for 3.05mm Ø rods） |
| 3240 | Carbon rod evaporation head insert （for 6.15mm Ø rods）. Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical （less wastage）. |
| 3250 | Carbon fiber evaporation head insert |
| 3260 | Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards （T E and T ES versions only）. Supplied with a pack of ten tungsten filaments and a molybdenum boat. |
| 3270 | Extended height vacuum chamber （214mm high – the standard chamber is 127mm high）. For increased source to sample distance and for coating large specimens |
| 3280 | Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited |
| 3290 | Film thickness monitor （FTM） attachment. Consists of a built in chamber mounted quartz crystal oscillator （includes crystal）. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited |
| 3300 | Spare quartz crystals. Pack of three |
| 3320 | Full range vacuum gauge for low and high vacuum measurement （a low vacuum Pirani gauge is fitted as standard） |
| 4513 | Glow discharge insert to modify surface properties （eg hydrophobic to hydrophilic conversion） or to clean surface residues （TS and T ES only）. Can be retrofitted |
| 3600 | Metal evaporation basket - pack of 10 （for use with metal evaporation head） |
| 3610 | Two-year spares kit for EMS150T S Includes: chromium target, glass cylinder, carbon fibre cord, quartz crystals, O-rings |
| 3620 | Two-year spares kit for EMS150T E Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings |
| 3630 | Two-year spares kit for EMS150T ES Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings |
| 貨號 | 產品名稱 |
| 3330 | Rotation stage, 50mm Ø （supplied as standard）. This stage only rotates – no tilt or height adjustment |
| 3340 | Rotate-tilt specimen stage with adjustable tilt （up to 90 degrees） and height （37mm-60mm）. Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
| 3350 | Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
| 3360 | Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm |
| 3370 | Rotating specimen stage for glass microscope slides （up to two x 75mm x 25mm slides）. Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used |
| 貨號 | 產品名稱 |
| 3410 | 57mm Ø x 0.1mm Gold |
| 3411 | 57mm Ø x 0.1mm Gold/Palladium （80/20） |
| 3412 | 57mm Ø x 0.1mm Platinum |
| 3413 | 57mm Ø x 0.1mm Nickel |
| 3414 | 57mm Ø x 0.1mm Silver |
| 3415 | 57mm Ø x 0.1mm Palladium |
| 3416 | 57mm Ø x 0.1mm Copper |
| 3417 | 57mm Ø x 0.3mm Chromium |
| 3418 | 57mm Ø x 0.5mm Tungsten |
| 3419 | 57mm Ø x 1.5mm Chromium |
| 3420 | 57mm Ø x 0.2mm Tungsten |
| 3421 | 54mm Ø x 1.5mm Carbon |
| 3422 | 57mm Ø x 0.1mm Aluminium |
| 3423 | 57mm Ø x 0.1mm Platinum/Palladium （80/20） |
| 3424 | 57mm Ø x 1.5mm Titanium |
| 3425 | 57mm Ø x 0.3mm Platinum/Palladium （80/20） |
| 3426 | 57mm Ø x 0.3mm Gold |
| 3427 | 57mm Ø x 0.3mm Gold/Palladium （80/20） |
| 3428 | 57mm Ø x 0.3mm Platinum |
| 3429 | 57mm Ø x 0.5mm Titanium |
| 3430 | 57mm Ø x 0.1mm Iron |
| 3431 | 57mm Ø x 0.3mm Iridium |
| 3432 | 57mm Ø x 0.1mm Cobalt |
| 3433 | 57mm Ø x 0.1mm Tin |
| 3434 | 57mm Ø x 0.1mm Molybdenum |
| 3435 | 57mm Ø x 0.3mm Magnesium |
| 3436 | 57mm Ø x 0.1mm Tantalum |
| 3437 | 57mm Ø x 3mm Indium Tin Oxide （90/10） |
| 3500 | Carbon rods – 6.15mm Ø x 100mm length （unshaped） pack of 10 |
| 3510 | Carbon rods – 6.15mm Ø x 50mm length （shaped） pack of 10 |
| 3520 | Carbon rods - 3.05mm Ø x 50mm length （shaped） pack of 10 |
| 3530 | Carbon rods 3.05mm Ø x 300mm length （unshaped） pack of 10 |
| 3540 | Carbon fibre cord - high purity - 1m |
| 3550 | Carbon fibre cord - high purity - 5m |
| 3560 | Carbon fibre cord - standard grade - 1m |
| 3570 | Carbon fibre cord - standard grade - 10m |
| 3580 | Carbon fibre cord - standard grade - 100m |
| 3590 | Manual rod shaper for 6.15mm Ø carbon rods |
| 3595 | Manual rod shaper for 3.05mm Ø carbon rods |
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