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武漢凱芯通半導體技術有限公司
武漢凱芯通半導體技術有限公司
漢鐘變螺距螺桿真空泵排氣路徑短，減少反應物沉積，線形密封性佳，泵浦性能
| 機型Model | 單位Unit | PDF110 | PD120 | PD300 | PD400 | PD650 | PD800 | |||
| 抽氣速度 Pumping Speed (50Hz/60Hz) | l/min | 1800 | 1667/2000 | 4167/5000 | 5556/6667 | 9030/10840 | 11011/13233 | |||
| m3/hr | 110 | 100/120 | 250/300 | 333/400 | 540/650 | 680/800 | ||||
| Cfm | 65 | 59/71 | 147/176 | 196/236 | 317/382 | 393/471 | ||||
| 壓力 Ultimate Pressure | Torr | ≤7.5*10-3 | ||||||||
| mbar | ≤1*10-2 | |||||||||
| Pa | ≤1 | |||||||||
| 馬達 Motor | 頻率Frequency | Hz | 50/60 | |||||||
| 電壓Voltage | V | 220-440 | ||||||||
| 額定功率 Rated Power | Hp | 3 | 4/4.8 | 8/10 | 15/20 | 25/30 | 25/30 | |||
| kW | 2.2 | 2.98/3.58 | 6.7/7.5 | 11/15 | 18.5/22 | 18.5/22 | ||||
| 連接 Connection | 進氣口Inlet | NW50 | NW50 | ISO63 | ISO63 | ISO100 | ISO100 | |||
| 排氣口Outlet | NW25 | NW40 | NW40 | NW40 | ISO63 | ISO63 | ||||
| 冷卻水 Cooling Water | 接頭Connection | RC3/8 | ||||||||
| 壓力Pressure | Mpa | 0.2—0.4 | ||||||||
| 溫度temperature | ℃ | 25 | 3slm18℃-6slm28℃ | 6slm18℃-15slm28℃ | ||||||
| 流量 Flow | l/min | 1 | ||||||||
| 氮氣 N2 | 壓力Purge Pressure | MPa | 0.15-0.2 | |||||||
| 稀釋流量 Dilute flow | L/min | By process | ||||||||
| 密封流量 Sealing foow | L/min | 10 | ||||||||
| 接頭Connection | Swagelok 1/4" | Swagelok 3/8" | ||||||||
| 尺寸Dim. | 長×寬×高L×W×H | mm | 398*358*551 | 814*380*663 | 1075*430*650 | 1582*700*757 | 1831*610*735 | 1831*610*735 | ||
| 重量Weight | Kg | 132 | 280 | 390 | 750 | 1050 | 1050 | |||
| 噪音Noise | dB(A) | ≤68 | ≤66 | ≤70 | ≤72 | ≤75 | ≤75 | |||
| 系統漏率 System Max. Leak-rate | mbar.l/s | 1*10-5 | ||||||||
| 室溫操作范圍Operation Temp. | ℃ | 5-40 | ||||||||
| 操作濕度Operation Moisture | RH | 90%以上 | ||||||||
| 機型Model | 單位Unit | PDF110 | PD120 | PD300 | PD400 | PD650 | PD800 | |||
| 抽氣速度 Pumping Speed (50Hz/60Hz) | l/min | 1800 | 1667/2000 | 4167/5000 | 5556/6667 | 9030/10840 | 11011/13233 | |||
| m3/hr | 110 | 100/120 | 250/300 | 333/400 | 540/650 | 680/800 | ||||
| Cfm | 65 | 59/71 | 147/176 | 196/236 | 317/382 | 393/471 | ||||
| 壓力 Ultimate Pressure | Torr | ≤7.5*10-3 | ||||||||
| mbar | ≤1*10-2 | |||||||||
| Pa | ≤1 | |||||||||
| 馬達 Motor | 頻率Frequency | Hz | 50/60 | |||||||
| 電壓Voltage | V | 220-440 | ||||||||
| 額定功率 Rated Power | Hp | 3 | 4/4.8 | 8/10 | 15/20 | 25/30 | 25/30 | |||
| kW | 2.2 | 2.98/3.58 | 6.7/7.5 | 11/15 | 18.5/22 | 18.5/22 | ||||
| 連接 Connection | 進氣口Inlet | NW50 | NW50 | ISO63 | ISO63 | ISO100 | ISO100 | |||
| 排氣口Outlet | NW25 | NW40 | NW40 | NW40 | ISO63 | ISO63 | ||||
| 冷卻水 Cooling Water | 接頭Connection | RC3/8 | ||||||||
| 壓力Pressure | Mpa | 0.2—0.4 | ||||||||
| 溫度temperature | ℃ | 25 | 3slm18℃-6slm28℃ | 6slm18℃-15slm28℃ | ||||||
| 流量 Flow | l/min | 1 | ||||||||
| 氮氣 N2 | 壓力Purge Pressure | MPa | 0.15-0.2 | |||||||
| 稀釋流量 Dilute flow | L/min | By process | ||||||||
| 密封流量 Sealing foow | L/min | 10 | ||||||||
| 接頭Connection | Swagelok 1/4" | Swagelok 3/8" | ||||||||
| 尺寸Dim. | 長×寬×高L×W×H | mm | 398*358*551 | 814*380*663 | 1075*430*650 | 1582*700*757 | 1831*610*735 | 1831*610*735 | ||
| 重量Weight | Kg | 132 | 280 | 390 | 750 | 1050 | 1050 | |||
| 噪音Noise | dB(A) | ≤68 | ≤66 | ≤70 | ≤72 | ≤75 | ≤75 | |||
| 系統漏率 System Max. Leak-rate | mbar.l/s | 1*10-5 | ||||||||
| 室溫操作范圍Operation Temp. | ℃ | 5-40 | ||||||||
| 操作濕度Operation Moisture | RH | 90%以上 | ||||||||
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