商品簡(jiǎn)介
指標(biāo) | Specifications | |
流量測(cè)量范圍 | 0-1,2,3,5,10,20,50,100,250SLM | Flow range |
流量測(cè)量范圍 | ±1% F.S.(100SCCM~10SLM N2) ±2% F.S.(20SLM~250SLM N2) | Accuracy of flow |
壓力測(cè)量范圍 | 0~1.5 MPa | Pressure range |
壓力測(cè)量精度 | 0.1%FS | Accuracy of pressure |
系統(tǒng)單點(diǎn)漏率 | 1×10-7SCCS He | Leak integrity |
供電電源 | ~220VAC±10% | Power supply |
zui大功耗 | 15 W | Max consumption |
外形尺寸 | 440×260×260mm | Dimension |
重量 | 8 Kg | Weight |