規格
| 類型 | IC6 | |
|---|---|---|
| 測量性能 | ||
| 分辨率 (1) | | 0.00433 Å/s/M |
| 晶體頻率偏移 | | 1.5 MHz |
| 晶體范圍和精確性（來自 100-ms 樣品） | | 6.0 to 4.5 MHz +/- 0.0035 Hz |
| 厚度精度 (2) | | 0.5% |
| 測量頻率 | | 10 Hz |
| 多個測量值平均 | | 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed |
| 設計功能 | ||
| Auto Z | | yes |
| 自動色調 | | yes |
| 共沉積 | | yes (up to 6 sources) |
| 過程配方和數據管理 | ||
| 材料計劃 | | 32 |
| 過程層（每個過程） | | 200 |
| 過程 | | 50 (processes can be linked together) |
| USB 存儲器 | | yes |
| 數據記錄 | | yes |
| 硬件功能 | ||
| 傳感器 (3) | | |
| 單 | | 8 |
| 雙 / CrystalTwo® | | 4 / 8 (with CrystalTwo® Switch) |
| CrystalSix® | | 8 |
| Crystal 12® | | 8 |
| 通用 | | 8 |
| 來源控制 | | |
| 來源數量 (4) | | up to 6 |
| 來源控制電壓 | | 0 to +/-10 V, adjustable |
| 輸出分辨率 | | 15 bits over full range (0 to 10V) |
| 坩堝位置 | | 64 |
| 輸入 / 輸出 | | |
| 輸入 | | 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground |
| 輸出 | | 8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V peak @ 2.5 amps; 14 optional TTL outputs |
| 記錄器輸出 (4) | | 0 to +10 V, adjustable |
| 邏輯語句 | | 100 fully programmable; up to 5 actions, 5 events per statement |
| 通信 | | |
| 標準 | | RS232 |
| 可選 | | Ethernet |
| 顯示器 | ||
| 厚度分辨率 | | 1 Å for 0 to 9.999 kÅ 10 Å for 10.00 to 99.99 kÅ 100 Å for 100.0 to 999.9 kÅ 1 kÅ for 1000 to 9999 kÅ |
| 速率分辨率 | | 0.001 for 0 to 9.999 Å/s if rate filter time setting is 10 seconds or greater 0.01 for 0 to 99.99 Å/s 0.1 for 100 to 999.9 Å/s |
| 操作 | ||
| 電源要求 | | 100 – 230 V (ac) +/- 15% 50 / 60 Hz +/- 3 Hz |
| 工作溫度 | | 0 to 50 C (32 to 122 F) |
| 尺寸，不包括安裝件（高 x 寬 x 深） | | 5.25” x 19” x 13” (133mm x 483mm x 330 mm) |
| 重量 | | 23 lbs (10.5 kg) |
