JDS-1立式接觸式干涉儀
本儀器是一種采用量塊或標準零件借以高精度的比較方式的立式精密長度計量儀器。主要用于150mm以下塊規,亦可用作高精密度的長度和外徑的精密測量,是各級計量室的基本長度計量儀器之一。
JDS-1 Interferometer is applicable for measurement of 3-4 grade gauge blocks or precision sizes up to 150 mm by high-precision comparison with a higher grade of gauge block or a standard reference component. It is one of the basic length-metrological instruments.
and cylinders.
JDS-1立式接觸式干涉儀技術參數:
Max. measured length
工作臺行程
Lifting range of worktable
5 mm 測桿移動范圍 0.5mm 分劃板刻度范圍 ±50格
Measuring range
Adjusting range of grad
0.05-0.2 μm
0.1 μm
Measuring force
Indication reliability
0.02 μm
儀器誤差
Indication error
Digital display
Max.measurement error
n 是格數, i是格值,λ是濾光片中心波長,△λ是濾光片波長誤差
n is number of divisions, i is division value △λ is error of wavelength
儀器體積
Dimensions
儀器重量
Weight
40 kg 標準配件
Standard attachments
五筋園臺Five-Rib circular stage
九筋瑪瑙臺Agate stage
可調園平臺Adjustable planar stage
輔助臺Auxiliary stage, fixed
平面測帽Planar contact tip, Ф2
小球面測帽Small spherical contact tip
干涉濾光片 Wavelength filter
利用光學杠桿的放大原理,將微小的位移量轉換為光學影象的移動。其工作原理如左圖所示。