非接觸式方塊電阻測試儀
昊量光電新推出用于導電薄膜和薄金屬層方塊電阻測量的非接觸式方阻測量儀EddyCus TF Series，這款非接觸式方塊電阻測量儀可以非接觸式實時測量，對導電薄膜和金屬方塊電阻精確測量，表征已被隱藏和封裝的導電層，并把測量數據保存和導出。
非接觸式方塊電阻測試儀主要測試對象：
鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導體晶片
金屬化層和晶圓金屬化
電池電極
導電涂布紙和導電紡織品
非接觸式單點方阻測試儀EddyCus TF Lab 2020SR
EddyCus TF Lab 2020SR是非接觸式單點薄層電阻測量系統。該裝置包含一個渦流傳感器組，感應弱電流到導電薄膜和材料。試樣中的感應電流產生與測量對象的片電阻相關的電磁場。電渦流技術不依賴于表面特征或形貌。此外，它不需要如已知的2或4點探針測試(2PP, 4PP)或霍爾效應或范德波測量一樣進行任何形式的充分的樣品接觸或備樣。它既不需要設置測試結構，也不受表面粗糙度或非導電封裝或鈍化層的影響。此外，測量不會對被測薄膜產生物理影響。渦流儀器不存在機械磨損，使用壽命長。它的獨立性與接觸質量和它的高速允許實現高重復性和準確性，有利于在研發和測試實驗室的各種薄膜的系統質量保證。EddyCus工具可以由具有各種數據記錄和導出功能的SURAGUS軟件驅動，也可以由SURAGUS軟件開發套件驅動的客戶軟件驅動。
軟件和設備控制：
非常用戶友好的軟件
直觀的觸摸顯示導航
實時測量板材電阻和層厚
軟件輔助手動映射選項
各種數據保存和導出選項
非接觸式方塊電阻測試儀產品規格表
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Foils, glass, wafer, etc. |
| Substrate area | 8 inch / 204 mm x 204 mm (open on three sides) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 25 mm (defined by the thickest sample) |
| Thickness measurement range of metal films (e.g. copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Device dimensions (w/h/d) | 11.4” x 5.5” x 17.5” / 290 mm x 140 mm x 445 mm |
| Weight | 10 kg |
| Further available features | Sheet resistance measurement / metal thickness monitor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | <> | <> | <> | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc | |||||
非接觸式方阻成像儀EddyCus TF Map 2530SR
EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統。該設備配備了一個運動的渦流傳感器，每次掃描可測量高達90000 (300 x 300)測量點的方塊電阻。由于這種技術不需要與標本進行物理接觸，該設備可以在飛行運動中進行測量。此外，它具有很高的準確性，因為它是獨立于任何接觸質量。樣品中測量點的高密度確保了沒有遺漏任何效果或缺陷。此外，綜合分析功能支持生產和研發實驗室中各種薄膜的系統質量保證。
產品規格：
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Wafer, glass, foils etc. |
| Max. scanning area | 12 inch / 300 mm x 300 mm (larger upon request) |
| Edge effect correction / exclusion | 2 – 10 mm (depending on size, range, setup and requirements) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 15 mm (defined by the thickest sample) |
| Thickness measurement of metal films (e.g. aluminum, copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Scanning pitch | 1 / 2.5 / 5 / 10 / 25 mm (other upon request) |
| Measurement points per time (square shaped samples) | 100 measurement points in 0.5 minutes 10,000 measurement points in 3 minutes |
| Scanning time | 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch) 12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch) |
| Device dimensions (w/h/d) | 31.5” x 19.1” x 33.5” / 785 mm x 486 mm x 850 mm |
| Weight | 90 kg |
| Further available features | Metal thickness imaging, anisotropy and sheet resistance sensor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2,000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | <> | <> | <> | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance | |||||
便攜式方塊電阻測試儀
EddyCus TF便攜式1010SR專用于工業環境中的接觸片電阻測量。它使各種行業的手工質量保證成為可能。
| Measurement technology | Eddy current sensor |
| Measurement mode | Realtime at constant distance / contact |
| Substrates | Glass, foils etc. |
| Substrate sizes | Flat samples > 150 mm x 150 mm (6 inch x 6 inch) Curved editions are available for several applications (windshields etc.) |
| Measurement spot / high sensitivity zone | 40 mm diameter (1.6 inch) |
| Power | Lithium ion battery up to 20 h |
| Sheet resistance range (five setups available) | Type very low: 0.001 – 0.1 Ohm/sq Type low: 0.04 – 0.1 Ohm/sq Type standard: 0.3 – 30 Ohm/sq Type high: 0.3 – 50 Ohm/sq Type very high: 0.3 – 100 Ohm/sq |
| Thickness measurement of thin films (e.g. copper) | Additional feature, available range is 5 nm – 500 µm (in accordance with sheet resistance) |
| Emissivity range | Additional feature, available range is 0.003 – 0.5 |
| Accuracy (for planar solid surfaces, e.g. glass) | 0.001 – 50 Ohm/sq: <> 50 – 100 Ohm/sq: <> |
| Dlay | 2.8 inch colored touch screen |
| Device dimensions (w/h/d) | 3.5” x 7” x 1.9” / 87 mm x 178 mm x 48 mm |
| Weight | 340 g |
| Interfaces | Bluetooth (optional) + data center |
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上海昊量光電設備有限公司是光電產品專業代理商，產品包括各類激光器、光電調制器、光學測量設備、光學元件等，涉及應用涵蓋了材料加工、光通訊、生物醫療、科學研究、國防、、生物顯微、物聯傳感、激光制造等；可為客戶提供完整的設備安裝，培訓，硬件開發，軟件開發，系統集成等服務。
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