PSM是一臺(tái)差式泵質(zhì)譜儀（In-Line Plasma Analysers for Neutrals, Radicals and Ion Analysis），分析等離子過程中的二次離子和中性粒子。
·差式泵歧管，通過法蘭與過程反應(yīng)室連接
·電子附著選件，具有可調(diào)諧的離子源，用于表觀電勢MS
·Penning規(guī)和互鎖裝置可提供過壓保護(hù)
·信號(hào)選通分辨率1μs，用于研究脈沖等離子體或能量、質(zhì)量分布VS時(shí)間
·標(biāo)準(zhǔn)分析中性粒子、自由基，+ve / -ve 離子分析可選
·靈敏度高 / 極穩(wěn)定的3級(jí)過濾四極桿
·質(zhì)量數(shù)范圍： 0 ~ 2500amu
·脈沖離子計(jì)數(shù)檢測器，7個(gè)數(shù)量級(jí)的動(dòng)態(tài)范圍
·能量分析選件，標(biāo)準(zhǔn) ±100eV（1000eV可選 ）
·Mu-Metal, Radio-metal屏蔽可選， 高壓操作可選
·通過RS232、RS485或Ethernet LAN ，軟件MASsoft 控制
Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1 MB)
Mass Analysis of CF3I Decomposition in a Surface Barrier Discharge - GEC 2011 (2.8 MB)
Mass Spectroscopy of Metastable Atomic Species in Gas Analysis and Processing Plasmas at High Spectrometer Source Pressures - AVS 2011 (1.6 MB)
Mass Spectroscopy of Metastable Species during Plasma Processing - GEC 2011 (2.1 MB)
Time Resolved Ionisation Studies of HIPIMS - PSE 2006 (848 KB)
Mass Spectrometry in HiPIMS Plasmas - COST Workshop 2012 (3.2 MB)
