
設備簡述/Equipment Brief
ZY-11弧離子鍍膜機是我公司自主研發的超硬膜離子鍍膜機,采用的新型過濾弧源鍍膜技術、等離子體增強陽極輔助鍍膜技術,規劃了爐體內等離子體的路線和分布,增強了刻蝕效果,提高了離化率,使得靶材表面被均勻刻蝕,涂層表面更光滑致密,提升了涂層的結合力,確保了涂層厚度及涂層的均勻性。同時,新技術的應用提高了鍍膜效率,節約了能耗和運行成本。
ZY-1110 Big Arc ion vacuum coating machine is a super hard film ion coating machine, self-developed by IKS, adopted unique new filter arc source coating technology, plasma enhanced and anode assisted coating technology, the route and distribution of plasma inside of the furnace are planned, the ionization rate of the target material was enhanced, So that the surface of the target is etched uniformly, the coating surface is smooth and compact while the bonding force of the coating is optimized, ensure coating thickness and uniformity. Meanwhile, the application of new technology improves the efficiency of coating, saves energy and operation cost.
設備參數/Equipment Parameters
爐體尺寸Chamber Size | Ф1180XH1050 | 有效空間Effective Space | Ф800XH650 |
應用技術Applied Technology | IET+ BIG ARC | 靶材數量Quantity of Target Material | IET2+ARC9 xφ160 |
標準涂層Standard Coating | TiN, CrN, AlCrN, etc. | 其他復合涂層Other Composite Coating | TiAlCrN, TiSiN,TiAlCN,etc. |
生產周期Production Cycle | 4-6小時/爐4-6hours/furnace | 外圍尺寸Overall Dimension | L5800XW2100XH2100mm L4800XW3000XH2100 |
使用范圍Rang of Application | 適用于滾刀,鉆頭,棒狀銑刀,微鉆,刀粒等。Hobs,drills,stick milling cutter, micro-drill, cutter grain, etc |