型號描述

型號 8713 是一臺用于調節氣體質量流量的裝置，適合工藝技術領域內大多數的用途。在數字的電子調節設備中，會將以硅芯片為基礎的傳感器（參見第 2 頁的描述）提供的數值，與規定的額定值進行比較；存在調節偏差時，會通過一種 PI 調節算法對發送到比例閥上的調節參數進行修改，由此補償調節偏差。因為傳感器直接處于氣流中，所以設備的反應時間非常短。質量流量可以保持在一個確定的數值上，或遵循規定的額定值曲線輪廓，而不會受到壓力波動或設備中其他變化的影響。

1）采用 CMOSens® 技術的直接流量測量裝置，適合額定流量范圍 20 mlN/min 至 80 lN/min (N2)
2）高精度
3）反應快速
4）緊湊型結構和數字通訊

Type Description

The mass flow controller (MFC) type 8713 is suited for regulating the mass flow of gases over a big flow range. The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times. A direct-acting proportional valve from Bürkert guarantees a high sensitivity. The integrated PI controller ensures outstanding control characteristics of the MFC. Type 8713 can optionally be calibrated for two different gases; the user can switch between these two gases. The communication with master devices is fully digital, therefore no further analog/digital conversions are needed. The mass flow controller type 8713 fits for various applications, like e.g. burner controls, heat treatment, material coatings, bio reactors, fuel cell technology or test benches.

1）Nominal flow ranges from 0.010 lN/min to 80 lN/min
2）High accuracy and repeatability
3）Very fast settling times
4）Digital communication via RS485
5）Compact version

氣體質量流量控制器部分訂貨號如下：

667530 KOMP-800-8713-G667-530-00-