Main features:
主要特點(diǎn)
1) 管內(nèi)設(shè)計(jì)了氣氛噴射器可將實(shí)驗(yàn)所需氣氛直接噴射在物料處,有助于反應(yīng)更充分。
Atmosphere injector design inside tube can directly inject the necessary atmosphere onto materials to help react more fully.
2) 樣品平放在內(nèi)管上可以實(shí)現(xiàn)內(nèi)管和外管同時(shí)通氣體,平放的樣品有助于薄膜生長(zhǎng),電極測(cè)試,溫度更均勻。
Sample put horizontally on the inner tube can let gas flow into outer/inner tube simultaneously, and horizontal sample is helpful for film growth& electrode test, with evener temperature.
3) 該設(shè)備也具有可作為氧化物晶體生長(zhǎng),退火等功能。
The device can also make oxide crystals grow, and anneal, etc.
Technical Parameters
技術(shù)參數(shù)
Power 輸入電源 | · Power rated: 3KW · 額定功率:3KW |
Voltage 電壓 | · Voltage rated: AC208-240V 50/60HZ · 額定電壓: AC208-240V 50/60HZ |
Working Temperature 工作溫度 | · Max. Temperature: 1200 °C ( 1 hr) Z高溫度:1200℃ (1小時(shí)) · Continuous working temperature: ≤1100℃ 持續(xù)工作溫度:≤1100℃ · Recommended heating Rate: ≤15°C /min 推薦升溫速率:≤10℃/分 |
控溫方式 | · PID automatic control and auto-tune function. 模糊PID控制和自整定調(diào)節(jié) · 30 programmable segments for precise thermal processing. 智能化30段可編程控制 · Built-in protection for the over-heated and broken thermocouple. 超溫和斷偶報(bào)警功能 |
Length of heating zone 加熱區(qū)長(zhǎng)度 | · 440mm |
Length of constant zone 恒溫區(qū)長(zhǎng)度 | · 200mm |
Heating Elements 加熱元件 | · Resistance wire, Fe-Cr-Al Alloy doped by Mo · 電阻絲(摻鉬鐵鉻鋁合金) |
Temperature Accuracy 控溫精度 | +/- 1 °C |
Processing tube 爐管 | · Tube size:Φ50/60/80/100*1000mm(optional) 爐管尺寸:Φ50/60/80/100*600mm(管徑可選) · Two tube blocks are included for blocking heat radiation generated from tube center, must be fully inserted into the furnace chamber before heating(quartz or ceramic optional) 兩個(gè)管堵阻擋管中心產(chǎn)生的熱輻射,必須在加熱前塞進(jìn)爐膛的正確位置(石英和氧化鋁可選)
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Dimensions 尺寸 | · Furnace size: 590*380*500mm(L*W*H without tube & flange) 爐子尺寸: 590*380*500mm(長(zhǎng)*寬*高 不含爐管和法蘭) |
Net Weight 凈重 | 60kg |
Shipping Weight 毛重 | 90kg |
真空法蘭 | · Special designed flanges 定制法蘭
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Vacuum Pressure 真空壓力 | · 133torr can be achieved by mechanical pump 機(jī)械泵可達(dá)133torr(1pa) · 10^-6 torr can be reached by molecular pump 分子泵可達(dá)10^-6torr(10^-3pa) · Please click the picture below to order vacuum pump 點(diǎn)擊下列圖片訂購(gòu)真空部件 |
Warranty 質(zhì)保 | One year limited warranty with lifetime support (Such consumable parts as tube, quartz block, and O-rings, etc. are NOT supported by the warranty) 一年質(zhì)保終身支持(消耗品如爐管,石英管堵,O型圈等不在質(zhì)保范圍內(nèi)) |
Warning 注意事項(xiàng) | · Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating. · 在使用過(guò)程中爐膛表面可能出現(xiàn)細(xì)小裂紋。這是正常情況,裂紋可以用氧化鋁涂層修復(fù)。 |
Compliance 認(rèn)證 | · CE Certified CE認(rèn)證 · The furnace is ready to pass TUV (UL61010) or CSA certification at extra cost. 可付費(fèi)進(jìn)行TUV(UL61010)或CSA認(rèn)證 |
Operation instructions 操作指導(dǎo) | · Click to download the operating manual · 點(diǎn)擊下載說(shuō)明書(shū) |